Detail publikace

In situ measurements of surface homogeneity of optical parameters of weakly absorbing thin films

SPOUSTA, J., ŠIKOLA, T., ZLÁMAL, J., URBÁNEK, M., NAVRÁTIL, K., JIRUŠE, J., CHMELÍK, R., NEBOJSA, A.

Originální název

In situ measurements of surface homogeneity of optical parameters of weakly absorbing thin films

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

In the paper the instrument working on the principles of spectral reflectivity and designed in our group for in situ monitoring of surface homogeneity of optical parameters of weakly absorbing thin films was tested in a series of ex- and in situ experiments. The tests confirmed that it is a convenient tool for the in situ quasi-real time monitoring of surface homogeneity of thicknesses and optical parameters of small area thin films (up to 1 cm2) during their etching and growth. By this method a homogeneous growth of an SiO2 film with an average growth rate of 103 nm/hour in one pilot point during the deposition by ion beam sputtering of a quartz target was monitored in situ. On the other hand, the ion beam etching rate of the thermal SiO2 film was lower than 3.3 nm/min and the enhanced roughness of the etched film in comparison to the initial one was observed.

Klíčová slova v angličtině

spectroscopic reflectometry, surface homogeneity, in situ monitoring

Autoři

SPOUSTA, J., ŠIKOLA, T., ZLÁMAL, J., URBÁNEK, M., NAVRÁTIL, K., JIRUŠE, J., CHMELÍK, R., NEBOJSA, A.

Rok RIV

2002

Vydáno

1. 8. 2002

ISSN

0142-2421

Periodikum

Surface and Interface Analysis

Ročník

34

Číslo

1

Stát

Spojené království Velké Británie a Severního Irska

Strany od

664

Strany do

667

Strany počet

4

BibTex

@article{BUT40891,
  author="Jiří {Spousta} and Tomáš {Šikola} and Jakub {Zlámal} and Michal {Urbánek} and Karel {Navrátil} and Jaroslav {Jiruše} and Radim {Chmelík} and Alois {Nebojsa}",
  title="In situ measurements of surface homogeneity of optical parameters of weakly absorbing thin films",
  journal="Surface and Interface Analysis",
  year="2002",
  volume="34",
  number="1",
  pages="4",
  issn="0142-2421"
}