Detail publikace

Difference between SE and BSE contrast in ESEM

LINHART, J. NEDĚLA, V.

Originální název

Difference between SE and BSE contrast in ESEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper deals with the study of secondary electrons (SE) and backscattered electrons (BSE) contrast in the environmental scanning electron microscopy (ESEM). The main difference of SE and BSE detection in ESEM is influenced by the used detector system. The gaseous SE detector and the scintillation BSE detector can be used. For the reason to understand differences between SE and BSE imaging, the theoretical background of generation, detection and characters of SE and BSE and mechanism of interactions between electrons and environmental conditions are described. This theory is verified by direct comparative pictures of nonconductive samples at variable pressure.

Klíčová slova v angličtině

secondary electrons, backscattered electrons, environmental scanning electron microscopy, observating of nonconductive samples

Autoři

LINHART, J.; NEDĚLA, V.

Vydáno

9. 2. 2005

Nakladatel

Faculty of electrical engineering and information technology, Slovak University of technology

Místo

Bratislava

ISBN

80-7043-474-0

Kniha

Proceedings of the seventh conference for PhD students ELITECH 2005

Strany od

103

Strany do

105

Strany počet

3

URL

ÚPT AVČR Brno

BibTex

@inproceedings{BUT14417,
  author="Jan {Linhart} and Vilém {Neděla}",
  title="Difference between SE and BSE contrast in ESEM",
  booktitle="Proceedings of the seventh conference for PhD students ELITECH 2005",
  year="2005",
  pages="3",
  publisher="Faculty of electrical engineering and information technology, Slovak University of technology",
  address="Bratislava",
  isbn="80-7043-474-0",
  url="ÚPT  AVČR Brno"
}