Detail publikačního výsledku

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

NEUMAN, J.; NOVÁČEK, Z.; NOVOTNÁ, V.; HEGROVÁ, V.; FLAJŠMAN, L.

Originální název

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

Anglický název

LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Atomic force microscope (AFM) LiteScope (TM) produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging - Correlative Probe and Electron Microscopy (TM) (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.

Anglický abstrakt

Atomic force microscope (AFM) LiteScope (TM) produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging - Correlative Probe and Electron Microscopy (TM) (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.

Klíčová slova

Correlative Probe and Electron Microscopy (CPEM); Atomic Force Microscopy (AFM); Scanning Electron Microscopy (SEM); Focused Ion Beam (FIB)

Klíčová slova v angličtině

Correlative Probe and Electron Microscopy (CPEM); Atomic Force Microscopy (AFM); Scanning Electron Microscopy (SEM); Focused Ion Beam (FIB)

Autoři

NEUMAN, J.; NOVÁČEK, Z.; NOVOTNÁ, V.; HEGROVÁ, V.; FLAJŠMAN, L.

Rok RIV

2023

Vydáno

16.10.2019

Nakladatel

TANGER LTD

Místo

SLEZSKA

Kniha

11TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2019)

ISSN

2694-930X

Periodikum

NANOCON ...

Stát

Česká republika

Strany od

568

Strany do

572

Strany počet

5

BibTex

@inproceedings{BUT182244,
  author="Jan {Neuman} and Zdeněk {Nováček} and Veronika {Novotná} and Veronika {Hegrová} and Lukáš {Flajšman}",
  title="LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION",
  booktitle="11TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2019)",
  year="2019",
  journal="NANOCON ...",
  pages="568--572",
  publisher="TANGER LTD",
  address="SLEZSKA",
  doi="10.37904/nanocon.2019.8655"
}