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Bachelor's Thesis
Author of thesis: Ing. Roman Skladaný
Acad. year: 2016/2017
Supervisor: Ing. Michal Páleníček, Ph.D.
Reviewer: doc. Ing. Jindřich Mach, Ph.D.
This bachelor thesis presents mechanical design of an objective protection of ultrahigh vacuum scanning electron microscope (UHV SEM), which is a part of a complex modular UHV system used for growth, observation and characterisation of nanostructures. Main physical and technical working principles of the UHV SEM system are explained. Furthermore, adaptation of a Knudsen cell used for growth of ultrathin layers in the UHV SEM system is described. Finally, a mechanical design of a shutter reducing overheating and contamination of objective during in situ growth and observation of nanostructures is drafted. The objective shutter also protects the sample from ambient heat radiation in case that sample is cooled to cryogenic temperatures.
UHV SEM, ultrathin layers, vacuum technology, thermal shield, Knudsen cell, cryogenic temperatures, UHV mechanical design
Date of defence
19.06.2017
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3A-P)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Michal Páleníček, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová