Course detail
Introduction to micro- and nanofabrication
CEITEC VUT-DS132Acad. year: 2024/2025
Not applicable.
Language of instruction
Czech, English
Mode of study
Not applicable.
Guarantor
Entry knowledge
Not applicable.
Rules for evaluation and completion of the course
Not applicable.
Aims
Not applicable.
Study aids
Not applicable.
Prerequisites and corequisites
Not applicable.
Basic literature
Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen, Volker Saile, and Jürg Leuthold, Springer, 2015, ISBN 978-3-662-44394-1 (CS)
Recommended reading
Not applicable.