Course detail

Thin Films

FCH-BAO_TPVAcad. year: 2020/2021

Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).

Offered to foreign students

Of all faculties

Learning outcomes of the course unit

Students acquire basic knowledge about thin-film technology, characterization and application. They can use this knowledge in their diploma thesis and later as technologists and researchers.


Basic chemistry and physics.


Not applicable.

Recommended optional programme components

Not applicable.


M. Ohring, Materials Science of Thin Films, Academic Press 2002 (EN)
D. Hoffman, B. Singh, J.H. Thomas, Handbook of Vacuum Science and Technology, Academic Press 1998 (EN)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004 (EN)
N. Inagaki, Plasma Surface Modification and Plasma Polymerisation. Lancaster: Technomic Publ., 1996 (EN)

Planned learning activities and teaching methods

The course uses teaching methods in form of Lecture - 2 teaching hours per week. The e-learning system (LMS Moodle) is available to teachers and students.

Assesment methods and criteria linked to learning outcomes

Entrance written test and oral exam are aimed at basic knowledge about thin film technologies and thin film characterization.

Language of instruction


Work placements

Not applicable.

Course curriculum

Introduction / information sources
Fundamentals of vacuum science
Introduction to plasma physics and chemistry
Physical vapor deposition
Chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Film growth
Film thickness
Scanning probe microscopy
Mechanical properties
Case study


Knowledge about advanced technologies and analyses of thin films is the aims of this subject.

Specification of controlled education, way of implementation and compensation for absences

Optional attendance at lectures.

Classification of course in study plans

  • Programme BPCP_CHCHT_INT Bachelor's

    branch BPCO_SCH , 1. year of study, summer semester, 4 credits, elective

  • Programme NPCP_CHM_INT Master's

    branch NPCO_CHM , 1. year of study, summer semester, 4 credits, elective

Type of course unit



26 hours, optionally

Teacher / Lecturer