Application of ToF - LEIS for Analysis of Surfaces and Ultra Thin Films

conference paper

English

Low Energy Ion Scattering (LEIS) belongs to a wide group of surface science analytical techniques. Low detection limit and extreme surface sensitivity are the main advantages of LEIS. Atomic composition of analysed surfaces is determined from the energy distribution of the scattered rare gas ions. Their kinetic energy can be measured by a Time-of-Flight (ToF) spectrometer. Capabilities of the ToF LEIS spectrometer will be demonstrated at analysis of gallium layers evaporated on a SiO2 substrate

ToF, LEIS, sputtering, Ga, SiO2

PRŮŠA, S., ŠIKOLA, T., BÁBOR, P.

2002

15. 11. 2001

FEI VUT v Brně

Brno

80-214-1992-X

Sborník příspěvků konference Nové trendy ve fyzice

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