Publication detail

Comparison of three focus sensors for optical topography measurement of rough surfaces

ŠARBORT, M. HOLÁ, M. PAVELKA, J. SCHOVÁNEK, P. ŘEŘUCHA, Š. OULEHLA, J. FOŘT, T. LAZAR, J.

Original Title

Comparison of three focus sensors for optical topography measurement of rough surfaces

Type

journal article in Web of Science

Language

English

Original Abstract

The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Keywords

PROFILOMETRYSTYLUSBEAM

Authors

ŠARBORT, M.; HOLÁ, M.; PAVELKA, J.; SCHOVÁNEK, P.; ŘEŘUCHA, Š.; OULEHLA, J.; FOŘT, T.; LAZAR, J.

Released

11. 11. 2019

ISBN

1094-4087

Periodical

OPTICS EXPRESS

Year of study

27

Number

23

State

United States of America

Pages from

33459

Pages to

33473

Pages count

15

URL

https://opg.optica.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804

BibTex

@article{BUT177917,
  author="Martin {Šarbort} and Miroslava {Holá} and Jan {Pavelka} and Petr {Schovánek} and Šimon {Řeřucha} and Jindřich {Oulehla} and Tomáš {Fořt} and Josef {Lazar}",
  title="Comparison of three focus sensors for optical topography measurement of rough surfaces
",
  journal="OPTICS EXPRESS",
  year="2019",
  volume="27",
  number="23",
  pages="33459--33473",
  issn="1094-4087",
  url="https://opg.optica.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804"
}