Publication detail

Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry

URBÁNEK, M., SPOUSTA, J., NAVRÁTIL, K., FIEDOR, M., CHMELÍK, R., BUČEK, M., ŠIKOLA, T.

Original Title

Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry

Type

conference paper

Language

English

Original Abstract

A system for large area thin film homognity diagnostics by spectroscopic reflectometry.

Key words in English

Thin Films, Reflectometry, Interferometry

Authors

URBÁNEK, M., SPOUSTA, J., NAVRÁTIL, K., FIEDOR, M., CHMELÍK, R., BUČEK, M., ŠIKOLA, T.

RIV year

2003

Released

6. 10. 2003

Publisher

ECASIA

Location

Berlin

Pages from

284

Pages to

284

Pages count

1

BibTex

@inproceedings{BUT11095,
  author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Marián {Fiedor} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola}",
  title="Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry",
  booktitle="ECASIA '03 Book of abstracts",
  year="2003",
  pages="1",
  publisher="ECASIA",
  address="Berlin"
}