Publication detail

MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer

MOZALEV, A. CALAVIA, R. VAZQUEZ, R. GRACIA, I. CANE, C. CORREIG, X. VILANOVA, X. GISPERT-GUIRADO, F. HUBALEK, J. LLOBET, E.

Original Title

MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer

Type

journal article - other

Language

English

Original Abstract

Practical microsensors for fast, highly sensitive hydrogen gas detection were fabricated by combining silicon integral technology for MEMS microhotplate platform with newly developed technological, electrical, and electrolytic conditions for forming nanostructured porous-anodic-alumina-templated WO3 layer as the sensing material. The morphology-structure-property relationship for the nanostructured sensing layer was determined by scanning electron microscopy, X-ray diffraction, and through systematically investigating the sensor performance at various H2 concentrations (5-1000 ppm) and operating temperatures (20-350oC). The sensors showed superior sensitivity to hydrogen gas, with the lowest detection limit ever reported for WO3 semiconductors (5 ppm), the fast response and recovery times (2-3 min), and the best sensitivity at 150oC, which was 100 times higher than that of a reference sensor having a smooth WO3 active film. The technology developed enables high-volume, low-cost, and low-power sensor-on-a-chip solution for a hydrogen-based energy economy where the use of highly sensitive and low-power-consuming devices is encouraged

Keywords

hydrogen detection; gas sensor; microhotplate; porous anodic alumina; tungsten trioxide

Authors

MOZALEV, A.; CALAVIA, R.; VAZQUEZ, R.; GRACIA, I.; CANE, C.; CORREIG, X.; VILANOVA, X.; GISPERT-GUIRADO, F.; HUBALEK, J.; LLOBET, E.

RIV year

2013

Released

11. 5. 2013

Publisher

Elsevier Ltd.

Location

Netherlands

ISBN

0360-3199

Periodical

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY

Year of study

38

Number

-

State

United Kingdom of Great Britain and Northern Ireland

Pages from

8011

Pages to

8021

Pages count

11

BibTex

@article{BUT100879,
  author="Alexander {Mozalev} and Raul {Calavia} and Rosa Maria {Vazquez} and Isabel {Grácia} and Carles {Cané} and Xavier {Correig} and Xavier {Vilanova} and Francesc {Gispert-Guirado} and Jaromír {Hubálek} and Eduard {Llobet}",
  title="MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer",
  journal="INTERNATIONAL JOURNAL OF HYDROGEN ENERGY",
  year="2013",
  volume="38",
  number="-",
  pages="8011--8021",
  issn="0360-3199"
}