Publication result detail

Ultrasonics spectroscopy of silicon single crystal

SEDLÁK, P.; TOFEL, P.; SEDLÁKOVÁ, V.; MAJZNER, J.; ŠIKULA, J.; HASSE, L.

Original Title

Ultrasonics spectroscopy of silicon single crystal

English Title

Ultrasonics spectroscopy of silicon single crystal

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation

English abstract

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation

Keywords

non-destructive testing, silicon single crystal, electro-ultrasonic spectroscopy, resonant ultrasonic spectroscopy

Key words in English

non-destructive testing, silicon single crystal, electro-ultrasonic spectroscopy, resonant ultrasonic spectroscopy

Authors

SEDLÁK, P.; TOFEL, P.; SEDLÁKOVÁ, V.; MAJZNER, J.; ŠIKULA, J.; HASSE, L.

RIV year

2012

Released

12.12.2011

Publisher

Versita

Location

Warsaw, Poland

ISBN

0860-8229

Periodical

Metrology and Measurement Systems

Volume

18

Number

4

State

Republic of Poland

Pages from

621

Pages to

630

Pages count

10

BibTex

@article{BUT75545,
  author="Petr {Sedlák} and Pavel {Tofel} and Vlasta {Sedláková} and Jiří {Majzner} and Josef {Šikula} and Lech {Hasse}",
  title="Ultrasonics spectroscopy of silicon single crystal",
  journal="Metrology and Measurement Systems",
  year="2011",
  volume="18",
  number="4",
  pages="621--630",
  issn="0860-8229"
}