Publication result detail

Tips chip measuring unit

Pavlík M., Magát M., Vrba R.

Original Title

Tips chip measuring unit

English Title

Tips chip measuring unit

Type

Paper in proceedings (conference paper)

Original Abstract

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

English abstract

This article describes design and construction of the measuring part of the tip chip measuring unit, which was made out to ensure measurement of the tested chip parameters. It offers possibility to measuring on whole wafer by chip by chip method. The measuring unit consists of the 2D work-bench and eight apexes with autonomous 3D positioning system. The measuring part consists of few blocks – Current measuring, Resistance measuring and Capacity measuring.

Keywords

tip, chip, measurement

Key words in English

tip, chip, measurement

Authors

Pavlík M., Magát M., Vrba R.

Released

14.09.2006

Publisher

Vysoké učení technické v Brně, Antonínská 548/1

Location

Brno

ISBN

80-214-3246-2

Book

EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

Pages from

254

Pages count

4

BibTex

@inproceedings{BUT18812,
  author="Michal {Pavlík} and Martin {Magát} and Radimír {Vrba}",
  title="Tips chip measuring unit",
  booktitle="EDS '06 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  year="2006",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="80-214-3246-2"
}