Publication detail

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Annanouch, F.E. Gracia, I Figueras, Llober, E.. Cane, C.. VALLEJOS VARGAS, S

Original Title

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

Type

journal article in Web of Science

Language

English

Original Abstract

The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO.

Keywords

AACVD; Functionalization; Gas sensor arrays; Localized synthesis; Nanostructures; Tungsten oxide

Authors

Annanouch, F.E.; Gracia, I; Figueras, Llober, E..; Cane, C..; VALLEJOS VARGAS, S

RIV year

2015

Released

1. 9. 2015

Publisher

ELSEVIER SCIENCE SA

Location

O BOX 564, 1001 LAUSANNE, SWITZERLAND

ISBN

0925-4005

Periodical

Sensors and Actuators B: Chemical

Year of study

216

Number

18270

State

Swiss Confederation

Pages from

374

Pages to

383

Pages count

216

URL

http://www.sciencedirect.com/science/article/pii/S0925400515004098

BibTex

@article{BUT117947,
  author="Annanouch, F.E. and Gracia, I and Figueras, Llober, E.. and Cane, C.. and VALLEJOS VARGAS, S",
  title="Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays",
  journal="Sensors and Actuators B: Chemical",
  year="2015",
  volume="216",
  number="18270",
  pages="374--383",
  doi="10.1016/j.snb.2015.03.076",
  issn="0925-4005",
  url="http://www.sciencedirect.com/science/article/pii/S0925400515004098"
}