Publication result detail

Use systems for the analysisof gas flow

MAXA, J.; NEDĚLA, V.; LEPLTOVÁ, K.; VYROUBAL, P.; VACULÍK, S.; HLAVATÁ, P.

Original Title

Use systems for the analysisof gas flow

English Title

Use systems for the analysisof gas flow

Type

Paper in proceedings (conference paper)

Original Abstract

Environmental scanning electron microscope is explaining withdrawing of two differently pumped chambers in drawing area. To solve this problem is used finite volume method. This method includes several steps. With using of mesh the area is dividing into discrete volume. Discretization and balancing of the unknown quantities in each finite volume. Numerical solution of discretized equations.

English abstract

Environmental scanning electron microscope is explaining withdrawing of two differently pumped chambers in drawing area. To solve this problem is used finite volume method. This method includes several steps. With using of mesh the area is dividing into discrete volume. Discretization and balancing of the unknown quantities in each finite volume. Numerical solution of discretized equations.

Keywords

finite volume method, simulation, gas flow

Key words in English

finite volume method, simulation, gas flow

Authors

MAXA, J.; NEDĚLA, V.; LEPLTOVÁ, K.; VYROUBAL, P.; VACULÍK, S.; HLAVATÁ, P.

RIV year

2020

Released

26.08.2014

Publisher

Brno: Tribun EU s. r. o.

Location

Mikulov

ISBN

978-80-87441-12-1

Book

Workshop of Interesting Topics of SEM and ESEM

Pages from

42

Pages to

45

Pages count

4

BibTex

@inproceedings{BUT110469,
  author="Jiří {Maxa} and Vilém {Neděla} and Kristýna {Lepltová} and Petr {Vyroubal} and Sebastian {Vaculík} and Pavla {Šabacká}",
  title="Use systems for the analysisof gas flow",
  booktitle="Workshop of Interesting Topics of SEM and ESEM",
  year="2014",
  pages="42--45",
  publisher="Brno: Tribun EU s. r. o.",
  address="Mikulov",
  isbn="978-80-87441-12-1"
}